About Us Research People Facilities Publications Picture Galleries Useful Links Contact Us SPRL Webmail		Seimconductor Physics Research Laboratory Department of Physics, Chulalongkorn University Bangkok, THAILAND       DC & RF Sputtering System (2" gun) The Balzer sputtering system consists of two 2" magnetron guns (DC & RF). The system is used for fabricating a Mo back-contact and a transparent conductive oxide thin films as a window layer in the CIGS-based thin film solar cells, including the reseach in the N- and P- types TCO materials. This system can accept a substrate size up to 5cm x 6cm.
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