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Seimconductor Physics Research Laboratory
Department of Physics, Chulalongkorn University
Bangkok, THAILAND
 
    DC & RF Sputtering System (4" gun)
The Leybold Univex 350 is installed with a 4" magnetron gun. It is used for fabricating the metal back-contact and a window layer of the CIGS-based thin film solar cells with a substrate size up to 10cm x 10cm.
     
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